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FLOWMETERS - Mass Flow Controllers

Mass Flow controller Mass Flow Controllers

MC Standard Series

Control responsively and stably with the fastest flow controller in the world. Maintain speed and accuracy at flows as low as 2.5 microliters per minute. Custom orifice sizing enables us to tailor-select a valve to satisfy your application and performance requirements.

 
Mass Flow controller Alicat MCR High-Flow Series

MCR High-Flow Series

Maintain speed and accuracy at high flows (50-3000 slpm). Alicat is the world’s only manufacturer of near-frictionless rolamite valves for precise control of high-rate gas flows. Proprietary orifice patterns enable us to customize a rolamite to satisfy your application and performance requirements.

 
Mass Flow controller Alicat MCW/MCRW

MCW/MCRW “Whisper” Low Pressure Drop Series

Minimize system impact with pressure drops as low as 4 mbar (0.06 psid) at full-scale flows. Alicat “Whisper” Series controllers enable flow control at near-atmospheric pressures, perfect for aerospace and environmental gas analysis applications. Max range: 0-500 slpm.

 
Mass Flow controller MCS/MCRS Anti-Corrosive Series

MCS/MCRS Anti-Corrosive Series

Withstand corrosion caused by aggressive gases such as NH3, H2S and SiH4 with durable 316L stainless steel. All ranges available. Click the “Quick Specs” tab for a listing of included corrosive gas calibrations.

 
Mass Flow controller MCD/MCRD Bidirectional Series

MCD/MCRD Bidirectional Series

Control flow in both directions with the world’s first bidirectional mass flow controller. May be customized as “Whisper” (MCDW) or anti-corrosive (MCDS) controller. All ranges available.

 
Mass Flow controller MCE SEMI-Standard Series

MCE SEMI-Standard Series

Upgrade aging or underperforming thermal flow controllers with Alicat’s MCE, an easy drop-in replacement with the same form, fit and function. We can match any manufacturer’s pinout configuration to ensure compatibility with your control system. Enclosed valve design and fittings conform to SEMI International Standards. Max range: 0-20 slpm. Also available with 316L stainless steel construction (MCES series).

 
Mass Flow controller MCV Vacuum Series

MCV Vacuum Series

The MCV Series for vacuum applications starts with an MCE (above) and adds an integrated pneumatic shut-off valve to prevent contamination during zero setpoint conditions. Max range: 0-20 slpm. Also available with 316L stainless steel construction (MCVS series).

 
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